Semiconductor industry

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Measurement technology on the highest level

High purity, media resistance, leak tightness and accuracy as well as the SEMATECH and SEMI standards all make up the basic requirements for the development and production of our measuring instruments for the semiconductor industry.

Our product range offers tailor-made solutions for pressure measurement in gas, chemical and solvent supply systems. Through our innovative product design, characterised by the low dead-space and excellent purge properties of the sensing surfaces, reduced start-up and maintenance times are possible.

For hazardous areas, in order that measurements can be made in accordance with appropriate laws and directives, we offer instruments in ATEX and/or FM certified designs.

Application examples

  • Gas distribution systems (gas sticks, gas panels, bulk-gas supply)
  • Ultra high purity water supply
  • Liquid chemical supply
  • Level measurement of liquid gases and solvents